Single-crystal silicon torsional resonators

Author

Mihailovich, Robert E. ; Zhang, Z.L. ; Shaw, K.A. ; MacDonald, Noel C.

Author_Institution

Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

fYear

1993

fDate

7-10 Feb 1993

Firstpage

184

Lastpage

188

Abstract

Micromechanical torsional resonators with micron-sized torsion rods fabricated from single-crystal silicon are described. The resonators and their excitation electrodes are fabricated with two simple processes called SCREAM (single-crystal-silicon reactive etch and metal). The properties of each electrode-actuator scheme are evaluated using electrostatic simulations. Such torsional resonators have potentially lower mechanical dissipation, and torsional resonators with integrated electrodes have potentially novel actuation applications

Keywords

electric sensing devices; elemental semiconductors; masks; micromechanical devices; photolithography; resonators; silicon; sputter etching; torsion; SCREAM; Si; electrostatic simulations; elemental semiconductors; excitation electrodes; integrated electrodes; micromechanical devices; micron-sized torsion rods; reactive etch and metal; single crystal Si; single-mask; torsional resonators; Bars; Clamps; Dielectric substrates; Electrodes; Etching; Geometry; Mechanical sensors; Sensor phenomena and characterization; Silicon; Thermoelasticity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296925

Filename

296925