Title :
Nanofluid handling by micro-flow-sensor based on drag force measurements
Author :
Gass, V. ; van der Schoot, B.H. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
A micro-flow-sensor for fluids is reported. The flow sensor operates over the 5-500-μL/min range, allowing the detection of minute volumes, down to nanoliter resolution. The sensing principle is the measurement of the drag exerted by the fluid onto an obstacle, a cantilever beam having overall dimensions of 0.03 mm×1 mm×3 mm. The sensor chip is manufactured with micro-machining technologies, requiring a set of six masks
Keywords :
drag; electric sensing devices; flow control; flow measurement; fluidics; materials handling; micromechanical devices; nanotechnology; Si; Si chip; cantilever beam; detection of minute volumes; drag force measurements; high precision flow control; micro-flow-sensor; microfluidics; micromachining; nanofluid handling; nanoliter resolution; on-chip sensor; six masks; Drag; Force measurement; Force sensors; Manufacturing; Microfluidics; Pumps; Semiconductor device measurement; Structural beams; Suspensions; Viscosity;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296928
