Title :
Integrated force arrays
Author :
Bobbio, S.M. ; Kellam, Mark D. ; Dudley, Bruce W. ; Goodwin-johansson, Scott ; Jones, Susan K. ; Jacobson, James D. ; Tranjan, Farid M. ; DuBois, Thomas D.
Author_Institution :
Dept. of Electr. Eng., North Carolina Univ., Charlotte, NC, USA
Abstract :
Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated systems of great complexity. The theory of operation, the methods of construction, and the observational results for IFA test structures are presented
Keywords :
VLSI; electric actuators; electrostatic devices; mechatronics; membranes; micromechanical devices; 1D motion; VLSI; artificial muscle; electrostatic force; flexible metallized membranes; highly articulated systems; integrated force arrays; macroscopic actuators; methods of construction; operation; patterned; test structures; voltage controlled muscle; Actuators; Biomembranes; Control systems; Electrostatics; Microelectronics; Microscopy; Optical arrays; Optical control; Polyimides; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296931
