Title :
Fluid-filled dielectric induction micromotor with Al-SiO2 rotor
Author :
Wagner, B. ; Fuhr, G. ; Muller, Tim ; Schnelle, Th. ; Benecke, W.
Author_Institution :
Fraunhofer-Inst. fuer Mikrostrukturtech., Berlin, Germany
Abstract :
Results obtained with a dielectric induction micromotor with an Al-SiO2 rotor are presented. The rotor and gold electrode stator, fabricated separately in IC processes, are immersed in a fluid (water, ethanol or glycerine). The aluminium rotors, 2-μm thick and 100-200 μm in diameter, are covered on all surfaces by a SiO2 layer. The motor was operated at field frequencies between 0.3 kHz and 30 MHz and applied voltages varying between 5 and 110 V. At maximum voltage, a rotation speed of 16000 rpm was measured. The calculated value of torque was approximately 3×10-13 Nm
Keywords :
induction motors; micromechanical devices; small electric machines; 0.3 kHz to 30 MHz; 5 to 110 V; Al disks; Al-SiO2 rotor; Au electrode stator; SiO2 layer; applied voltages; dielectric induction micromotor; ethanol; field frequencies; fluid-filled micromotor; glycerine; torque; water; Aluminum; Dielectrics; Electrodes; Ethanol; Frequency; Gold; Micromotors; Rotors; Stators; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296933
