DocumentCode :
1891931
Title :
Proceedings of Micro Electro Mechanical Systems
fYear :
1993
fDate :
10-10 Feb. 1993
Abstract :
The following topics are dealt with: actuators; fabrication techniques; sensors; and fluidic devices
Keywords :
actuators; detectors; micromechanical devices; nanotechnology; small electric machines; actuators; fabrication techniques; fluidic devices; microelectromechanical systems; micromachined structures; micromotors; sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL, USA
Print_ISBN :
0-7803-0957-X
Type :
conf
DOI :
10.1109/MEMSYS.1993.296934
Filename :
296934
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1891931
