A first functional current excited planar rotational magnetic micromotor

Author

Guckel, H. ; Christenson, T.R. ; Skrobis, K.J. ; Jung, T.S. ; Klein, J. ; Hartojo, K.V. ; Widjaja, I.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

1993

fDate

7-10 Feb 1993

Firstpage

7

Lastpage

11

Abstract

Complete integration and successful testing of a planar rotational magnetic micromotor have been demonstrated. The configuration is that of a three-phase variable reluctance stepping motor with 6 stator poles and 4 rotor poles. Stator and rotor heights of up to 300 μm are available and rotor diameters of 285 μm and 423 μm were tested. Maximum rotational speeds which have been achieved with open loop excitation exceed 30000 rpm and show no change with operation in vacuum. After testing to more than 5×10⁷ rotation cycles, deviations from initial operation are not observed. Vertical reluctance forces are used to levitate the rotor up to 50 μm over the substrate. Position signals are available via integrated photodiodes which allow the rotor speed to be monitored and provide the groundwork for an active closed-loop system

Keywords

micromechanical devices; reluctance motors; rotors; small electric machines; stators; stepping motors; 285 micron; 300 micron; 423 micron; active closed-loop system; integrated photodiodes; planar rotational magnetic micromotor; position sensors; rotor diameters; rotor heights; stator heights; three-phase variable reluctance stepping motor; vertical reluctance forces; Assembly; Hysteresis motors; Magnetic levitation; Magnetic separation; Micromagnetics; Micromotors; Reluctance motors; Rotors; Stators; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296942

Filename

296942