DocumentCode
1892012
Title
Laser/infrared evaluation of TAB innerlead bond integrity
Author
Teoh, Hongbee ; McGeary, Michael ; Ling, Jamin
Author_Institution
Digital Equipment Corp., Andover, MA, USA
fYear
1990
fDate
20-23 May 1990
Firstpage
442
Abstract
The feasibility of using laser/infrared technology as a noncontact and nondestructive inspection technique to assess tape automated bonded (TAB) inner-lead bond integrity was studied. Chip-on-tape samples with well-bonded inner leads and opens or lifted leads were evaluated. The peak thermal signals obtained during thermal decay after the laser was shut off were evaluated. For a given laser power and exposure time, good bonds and opens generated distinctly different infrared (IR) signatures during thermal decay. Typically, good bonds emitted peak amplitudes which were nominally two to five times lower than those for opens. These were attributed to the superior thermal dissipation properties of well-bonded interconnects as well as to the IR detector configuration in the inspector system. The IR signal modulations observed for well-bonded samples could be explained by the thermal mass/conductance variation associated with circuit metallization patterns on the silicon chip. The results showed that the technique investigated in this study could be adapted as an inprocess inspection scheme for detection of opens or lifted leads. However, refinements are still needed to improve the technique´s capability
Keywords
inspection; laser beam applications; nondestructive testing; production testing; reliability; tape automated bonding; TAB innerlead bond integrity; chip on tape samples; detection of opens; feasibility study; good bonds; infrared signatures; inprocess inspection scheme; laser IR evaluation; lifted leads; noncontact inspection scheme; nondestructive inspection technique; opens; peak amplitudes; peak thermal signals; reliability; thermal decay; thermal dissipation properties; thermal mass/conductance variation; thermal scanning; well-bonded interconnects; Bonding; Infrared detectors; Inspection; Integrated circuit interconnections; Metallization; Power generation; Power lasers; Power system interconnection; Silicon; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1990. ., 40th
Conference_Location
Las Vegas, NV
Type
conf
DOI
10.1109/ECTC.1990.122227
Filename
122227
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