Title :
Electromagnetic microrelays: concepts and fundamental characteristics
Author :
Hosaka, Hiroshi ; Kuwano, Hiroki ; Yanagiswa, K.
Author_Institution :
NTT Corp., Tokyo, Japan
Abstract :
An electromagnetic microrelay is proposed as a practical application of microelectromechanical systems (MEMS) technology, and the basic performance of key components is evaluated experimentally and analytically. A 1-mm3 relay target is the most practical and economical choice for electromagnetic actuation. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype having a spiral flat spring with a diagonal length of 0.5 mm was manufactured, and its basic switching performance was found to be more than ten times faster than conventional relays
Keywords :
contact resistance; electric actuators; electromagnetic devices; micromechanical devices; relays; 0.5 mm; MEMS technology; breakdown voltage; contact resistance; diagonal length; dynamic deflections; electrical characteristics; electrodes; electromagnetic actuation; electromagnetic microrelay; flat springs; low contact forces; mechanical characteristics; microelectromechanical systems; miniature prototype; static deflections; switching performance; very small loads; very small spacing; Electrical resistance measurement; Electromagnetic analysis; Electromagnetic forces; Electromagnetic measurements; Microelectromechanical systems; Micromechanical devices; Microrelays; Performance analysis; Relays; Springs;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296943
