Electromagnetic microrelays: concepts and fundamental characteristics

An electromagnetic microrelay is proposed as a practical application of microelectromechanical systems (MEMS) technology, and the basic performance of key components is evaluated experimentally and analytically. A 1-mm³ relay target is the most practical and economical choice for electromagnetic actuation. As a first step in development, electrical characteristics of the electrodes, i.e., contact resistance and breakdown voltage, are measured at very small spacing and low contact forces. Next, mechanical characteristics of the moving parts, i.e., static and dynamic deflections of flat springs, are measured for very small loads and displacements. A miniature prototype having a spiral flat spring with a diagonal length of 0.5 mm was manufactured, and its basic switching performance was found to be more than ten times faster than conventional relays