Title :
Fabrication of broadband MEMS antennas and application to target detection
Author :
Hutchings, Douglas A. ; El-Shenawee, Magda
Author_Institution :
Microelectron.-Photonics Program, Univ. of Arkansas, Fayetteville, AR, USA
Abstract :
This work details the fabrication processes for a broadband antenna on a MEMS steerable platform. The platform is capable of rotation around two independent axes through the use of four silicon torsion hinges. The device is fabricated using traditional bulk micromachining techniques. Silicon is used as the substrate material due to its well understood processing characteristics. The antenna is modified from the Fourpoint antenna and operates between 10-16 GHz. The device is characterized using an HP 8510C Vector Network Analyzer and is used for target detection in a custom built anechoic chamber. An artificial neural network post processing algorithm is implemented on the measured data for the detection of metal, glass and wood spheres with a diameter of 3/8".
Keywords :
anechoic chambers (electromagnetic); broadband antennas; electrical engineering computing; elemental semiconductors; micromachining; micromechanical devices; microwave antennas; network analysers; neural nets; object detection; silicon; HP 85IOC; Si; anechoic chamber; artificial neural network; broadband MEMS antenna fabrication; fourpoint antenna; frequency 10 GHz to 16 GHz; micromachining; post processing algorithm; silicon torsion hinge; substrate material; target detection; vector network analyzer; Antenna measurements; Artificial neural networks; Broadband antennas; Fabrication; Metals; Micromechanical devices;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2010 IEEE
Conference_Location :
Toronto, ON
Print_ISBN :
978-1-4244-4967-5
DOI :
10.1109/APS.2010.5561846
