Title :
Interdigitated sensorial system on flexible substrate
Author :
Pecora, A. ; Zampetti, E. ; Pantalei, S. ; Valletta, A. ; Minotti, A. ; Maiolo, L. ; Simeone, D. ; Cuscunà, M. ; Bearzotti, A. ; Macagnano, A. ; Mariucci, L. ; Fortunato, G.
Author_Institution :
Inst. for Microelectron. & Microsyst., CNR-IMM, Rome
Abstract :
In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.
Keywords :
conducting polymers; flexible electronics; humidity sensors; interdigital transducers; thin film transistors; ammonia sensor; electronic circuit interface; flexible substrate; humidity sensor; interdigitated sensorial system; sensing conductive polymer; Capacitors; Chemical industry; Dielectric materials; Dielectric substrates; Electrodes; Fabrication; Humidity; Polymers; Sensor systems; Transducers;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716373
