Title :
Optical microshutters and torsional micromirrors for light modulator arrays
Author :
Jaecklin, V.P. ; Linder, C. ; de Rooij, N.F. ; Moret, J.M. ; Vuilleumier, R.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
The fabrication and operation of surface micromachined light modulators are described. In particular, comb-driven polysilicon microshutters for interrupting a focused laser beam of 5 μm in diameter are characterized. The shutters are suspended by novel compact meander springs, which favor their application in dense light modulator arrays. Torsional micromirrors working in a reflection mode, having two mirror states, were realized using the same technology. Electrical pulses of less than 2 μs are sufficient to switch the mirror position
Keywords :
etching; integrated optics; micromechanical devices; mirrors; optical elements; optical modulation; optical workshop techniques; spatial light modulators; torsion; SLM; Si; comb-driven polysilicon microshutters; compact meander springs; efficient addressing; etching; fabrication; light modulator arrays; micromechanical arrays; operation; optical microshutter; reflection mode; surface micromachined light modulators; torsional micromirrors; Laser beams; Laser modes; Micromirrors; Mirrors; Optical arrays; Optical device fabrication; Optical modulation; Optical reflection; Springs; Switches;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296965
