Optical microshutters and torsional micromirrors for light modulator arrays

Author

Jaecklin, V.P. ; Linder, C. ; de Rooij, N.F. ; Moret, J.M. ; Vuilleumier, R.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

fYear

1993

fDate

7-10 Feb 1993

Firstpage

124

Lastpage

127

Abstract

The fabrication and operation of surface micromachined light modulators are described. In particular, comb-driven polysilicon microshutters for interrupting a focused laser beam of 5 μm in diameter are characterized. The shutters are suspended by novel compact meander springs, which favor their application in dense light modulator arrays. Torsional micromirrors working in a reflection mode, having two mirror states, were realized using the same technology. Electrical pulses of less than 2 μs are sufficient to switch the mirror position

Keywords

etching; integrated optics; micromechanical devices; mirrors; optical elements; optical modulation; optical workshop techniques; spatial light modulators; torsion; SLM; Si; comb-driven polysilicon microshutters; compact meander springs; efficient addressing; etching; fabrication; light modulator arrays; micromechanical arrays; operation; optical microshutter; reflection mode; surface micromachined light modulators; torsional micromirrors; Laser beams; Laser modes; Micromirrors; Mirrors; Optical arrays; Optical device fabrication; Optical modulation; Optical reflection; Springs; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296965

Filename

296965