DocumentCode
1892923
Title
Ultra-low-power hydrogen sensing with palladium nanowires
Author
Offermans, P. ; Crego-Calama, M. ; Brongersma, S.H. ; Tong, H.D. ; van Rijn, C.J.M.
Author_Institution
Holst Centre/IMEC-NL, Eindhoven
fYear
2008
fDate
26-29 Oct. 2008
Firstpage
98
Lastpage
101
Abstract
Palladium nanowires (50 nm diameter, ~5 mum length) have been fabricated on silicon substrates using conventional techniques. The room temperature hydrogen sensing behavior of individual nanowires was investigated. The nanowires show a reversible response to hydrogen concentrations as low as 2.5 ppm with an ultra low power consumption of less than 10 nW. The electrical resistance increases nonlinearly with the hydrogen concentration. Response times (t90) vary from 5 seconds (H2 concentrations > 20%) to 30 seconds (H2 concentrations < 100 ppm). The response times can be decreased by increasing the applied bias at the cost of sensitivity.
Keywords
electrical resistivity; gas sensors; nanofabrication; nanowires; palladium; Pd; Si; conventional technique; electrical resistance; hydrogen concentration; palladium nanowire fabrication; room temperature hydrogen sensing behavior; silicon substrate; temperature 293 K to 298 K; Delay; Fabrication; Hydrogen; Nanowires; Palladium; Sensor arrays; Silicon; Temperature sensors; Transducers; Wireless sensor networks;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2008 IEEE
Conference_Location
Lecce
ISSN
1930-0395
Print_ISBN
978-1-4244-2580-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2008.4716392
Filename
4716392
Link To Document