• DocumentCode
    1892923
  • Title

    Ultra-low-power hydrogen sensing with palladium nanowires

  • Author

    Offermans, P. ; Crego-Calama, M. ; Brongersma, S.H. ; Tong, H.D. ; van Rijn, C.J.M.

  • Author_Institution
    Holst Centre/IMEC-NL, Eindhoven
  • fYear
    2008
  • fDate
    26-29 Oct. 2008
  • Firstpage
    98
  • Lastpage
    101
  • Abstract
    Palladium nanowires (50 nm diameter, ~5 mum length) have been fabricated on silicon substrates using conventional techniques. The room temperature hydrogen sensing behavior of individual nanowires was investigated. The nanowires show a reversible response to hydrogen concentrations as low as 2.5 ppm with an ultra low power consumption of less than 10 nW. The electrical resistance increases nonlinearly with the hydrogen concentration. Response times (t90) vary from 5 seconds (H2 concentrations > 20%) to 30 seconds (H2 concentrations < 100 ppm). The response times can be decreased by increasing the applied bias at the cost of sensitivity.
  • Keywords
    electrical resistivity; gas sensors; nanofabrication; nanowires; palladium; Pd; Si; conventional technique; electrical resistance; hydrogen concentration; palladium nanowire fabrication; room temperature hydrogen sensing behavior; silicon substrate; temperature 293 K to 298 K; Delay; Fabrication; Hydrogen; Nanowires; Palladium; Sensor arrays; Silicon; Temperature sensors; Transducers; Wireless sensor networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2008 IEEE
  • Conference_Location
    Lecce
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-2580-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2008.4716392
  • Filename
    4716392