Title :
Equivalent-circuit model for electrostatic micro-torsion mirror
Author :
Matsuda, Kazunori
Author_Institution :
Dept. of Nano & Bio Mater. Eng., Tokushima Bunri Univ., Kagawa, Japan
Abstract :
An equivalent circuit model for micro-torsion mirror is reported, which uses open-source circuit simulator Qucs and demonstrated mixed simulation between micro mechanics and electrical circuit. In the simulation, electrostatic force, equation of motion, and Kirchhoff s law are considered. Mathematical operation in the equation of motion is interrupted as an electrical capacitor, so that a seamless multi-physics mixed simulation becomes possible.
Keywords :
electrostatic devices; micro-optomechanical devices; micromechanics; micromirrors; torsion; Kirchhoff law; electrical capacitor; electrostatic force; electrostatic microtorsion mirror; equation of motion; equivalent-circuit model; micromechanics; open-source circuit simulator Qucs; seamless multiphysics mixed simulation; Electrostatics; Equations; Equivalent circuits; Force; Integrated circuit modeling; Mathematical model; Solid modeling; equivalent circuit; mems; micro actuato; micro mirror;
Conference_Titel :
Computational Electronics (IWCE), 2010 14th International Workshop on
Conference_Location :
Pisa
Print_ISBN :
978-1-4244-9383-8
DOI :
10.1109/IWCE.2010.5677995
