Acoustic vs electric power response of a high-performance MEMS microspeaker

Author

Houdouin, Alexandre ; Durand, Stephane ; Yaakoubi, Nourdin ; Sassine, Gilbert ; Shahosseini, Iman ; Martincic, Emile ; Woytasik, Marion ; Moulin, Johan ; Lefeuvre, Elie

Author_Institution

Lab. d´Acoust., Univ. du Maine, Le Mans, France

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

94

Lastpage

97

Abstract

This paper presents the characterization of the acoustic performance of an electrodynamic MEMS microspeaker and the influence of magnets position, which allows halving device size while intensifying the force factor. This work is based on the previously reported MEMS microspeaker dedicated to handheld electronics. A vacuum-formed seal has been designed and applied to enhance acoustic performance at low frequencies. The efficiency of the electroacoustic conversion is increased by a factor 5-10 compared to conventional microspeakers and low harmonic distortions were observed. Measurements of the acoustic power versus electrical input power were carried out in an anechoic room within the hearing range.

Keywords

acoustoelectric devices; anechoic chambers (acoustic); electrodynamics; harmonic distortion; micromechanical devices; acoustic power response; anechoic room; electric power response; electroacoustic conversion; electrodynamic MEMS microspeaker; force factor; handheld electronics; high-performance MEMS microspeaker; low harmonic distortions; magnets position; vacuum-formed seal; Acoustics; Coils; Force; Magnetoacoustic effects; Magnetomechanical effects; Micromechanical devices; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6984941

Filename

6984941