DocumentCode
1894041
Title
Fabrication of thin-reliable multichip modules
Author
Hess, Glenn T. ; Sanders, Thomas J. ; Miller, Roy ; Gsteiger, Kurt
Author_Institution
Dept. of Electr. & Comput. Eng., Florida Inst. of Technol., Melbourne, FL, USA
fYear
1993
fDate
18-19 May 1993
Firstpage
56
Lastpage
58
Abstract
The fabrication of thin, reliable multichip modules has been demonstrated by Florida Institute of Technology. This involved developing encapsulation techniques to build multichip modules (MCMs) with a thickness less than 0.05 inches. The ultimate goal of these encapsulation techniques is to provide hermetic performance at a low cost while meeting specific environmental conditions
Keywords
circuit reliability; encapsulation; environmental testing; integrated circuit manufacture; multichip modules; Finesse software; MCM; encapsulation techniques; environmental test; hermetic performance; layout design; reliability; thin multichip module fabrication; Bonding; Costs; Etching; Fabrication; Gold; Multichip modules; Packaging; Substrates; Testing; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1993., Proceedings of the Tenth Biennial
Conference_Location
Research Triangle Park, NC
ISSN
0749-6877
Print_ISBN
0-7803-0990-1
Type
conf
DOI
10.1109/UGIM.1993.297037
Filename
297037
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