Title :
Plasma standard cell for laboratory demonstrations and experiments
Author :
Lane, Richard L. ; Grimsley, Thomas J.
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
The design, construction, and use of an apparatus for undergraduate laboratory experimentation and demonstration in the area of plasma technology and processes are described. Specific experiments being utilized are detailed. Plans for additional equipment features are discussed
Keywords :
demonstrations; education; integrated circuit technology; laboratory apparatus and techniques; plasma applications; semiconductor technology; laboratory apparatus; laboratory demonstrations; microelectronic fabrication; plasma processes; plasma standard cell; plasma technology; undergraduate laboratory experimentation; Educational institutions; Electrodes; Fabrication; Laboratories; Microelectronics; Plasma applications; Plasma materials processing; Sputter etching; Sputtering; Wet etching;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1993., Proceedings of the Tenth Biennial
Conference_Location :
Research Triangle Park, NC
Print_ISBN :
0-7803-0990-1
DOI :
10.1109/UGIM.1993.297055
