Title :
Analytical and finite-element modeling of a localized-mass sensor
Author :
Campanella, Humberto ; Esteve, Jaume ; Nouet, Pascal ; Martincic, Emile ; Uranga, Arantxa ; Barniol, Nuria
Author_Institution :
Centro Nac. de Microelectron. CNM-IMB, Consejo Super. de Investig. Cientificas CSIC, Barcelona
Abstract :
Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. A Masonpsilas model-based analytical approach to understand the non-linear behavior of the sensor is introduced. On the other hand, careful finite-element analysis (FEA) of the sensor is carried out for different mass-loading configurations. Based on both modeling and experimental results, the non-linear behavior of the localized-mass sensorpsilas responsivity is confirmed.
Keywords :
bulk acoustic wave devices; chemical sensors; finite element analysis; mass; Mason model; finite element modeling; localized mass sensor; thin-film bulk acoustic wave resonator; Acoustic sensors; Acoustic waves; Analytical models; Biosensors; Chemical and biological sensors; Electrodes; Film bulk acoustic resonators; Finite element methods; Silicon; Substrates;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716457
