A novel capacitive temperature sensor for a lab-on-a-chip system

Author

Qing-Ying Ren ; Li-Feng Wang ; Jian-Qiu Huang ; Cong Zhang ; Qing-An Huang

Author_Institution

Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

436

Lastpage

439

Abstract

A novel capacitive temperature sensor for a lab-on-a-chip (LOC) system is presented. The fluidic LOC system is for biological and chemical analysis, and it is fabricated by the Silicon-On-Glass (SOG) process. Fabrication process of the capacitive temperature sensor is compatible with the LOC system. The temperature sensor will provide a temperature monitor and control to the LOC system. Experimental results show that the sensor provides a sensitivity of 40.73fF/°C in the 0 to 80 °C range. In addition, the preliminary results of the proposed temperature sensor show a good linearity and repeatability performance over the whole testing range, which is important for practical use of temperature sensors.

Keywords

capacitive sensors; lab-on-a-chip; microfluidics; microsensors; temperature sensors; capacitive temperature sensor; fluidic LOC system; lab-on-a-chip system; silicon-on-glass process; temperature 0 degC to 80 degC; Capacitance; Fluids; Hysteresis; Sensitivity; Temperature; Temperature measurement; Temperature sensors; PDMS fluids; capacitive sensor; lab-on-a-chip; temperature sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985028

Filename

6985028