Title :
A novel capacitive temperature sensor for a lab-on-a-chip system
Author :
Qing-Ying Ren ; Li-Feng Wang ; Jian-Qiu Huang ; Cong Zhang ; Qing-An Huang
Author_Institution :
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
A novel capacitive temperature sensor for a lab-on-a-chip (LOC) system is presented. The fluidic LOC system is for biological and chemical analysis, and it is fabricated by the Silicon-On-Glass (SOG) process. Fabrication process of the capacitive temperature sensor is compatible with the LOC system. The temperature sensor will provide a temperature monitor and control to the LOC system. Experimental results show that the sensor provides a sensitivity of 40.73fF/°C in the 0 to 80 °C range. In addition, the preliminary results of the proposed temperature sensor show a good linearity and repeatability performance over the whole testing range, which is important for practical use of temperature sensors.
Keywords :
capacitive sensors; lab-on-a-chip; microfluidics; microsensors; temperature sensors; capacitive temperature sensor; fluidic LOC system; lab-on-a-chip system; silicon-on-glass process; temperature 0 degC to 80 degC; Capacitance; Fluids; Hysteresis; Sensitivity; Temperature; Temperature measurement; Temperature sensors; PDMS fluids; capacitive sensor; lab-on-a-chip; temperature sensor;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985028
