Title :
Noise effects on resonator bias polarization in CMOS-MEMS oscillators
Author :
Sobreviela, G. ; Riverola, M. ; Uranga, A. ; Barniol, N.
Author_Institution :
Univ. Autonoma de Barcelona, Bellaterra, Spain
Abstract :
In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS resonators, electrostatically driven and capacitively sensed over the total system behavior are studied. The effect of first, white noise and second, a pure tone, in power spectrum, phase noise and time jitter of the output signal of a CMOS MEMS-NEMS oscillator system are analyzed.
Keywords :
CMOS integrated circuits; jitter; micromechanical devices; nanoelectromechanical devices; oscillators; phase noise; resonators; CMOS-MEMS oscillators; DC bias voltage; MEMS-NEMS resonators; noise effects; phase noise; power spectrum; resonator bias polarization; time jitter; Electrodes; Jitter; Phase noise; Resonant frequency; White noise; CMOS-MEMS; MEMS-Based Oscillator; Noise; Radio-Frequency MEMS; oscillator Jitter;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985057
