DocumentCode
1895750
Title
Chapter 10, MultiPhysics problems in MEMS
fYear
2005
fDate
18-20 April 2005
Firstpage
201
Lastpage
201
Keywords
Damping; Electrostatics; Micromechanical devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN
0-7803-9062-8
Type
conf
DOI
10.1109/ESIME.2005.1502800
Filename
1502800
Link To Document