DocumentCode :
1895750
Title :
Chapter 10, MultiPhysics problems in MEMS
fYear :
2005
fDate :
18-20 April 2005
Firstpage :
201
Lastpage :
201
Keywords :
Damping; Electrostatics; Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN :
0-7803-9062-8
Type :
conf
DOI :
10.1109/ESIME.2005.1502800
Filename :
1502800
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1895750
