Title :
The computation of electrostatic forces in MEMS: spatial method vs. material method
Author :
Zeng, Kaiping ; Korvink, Jan G.
Author_Institution :
Dept. of Comput. Sci., Darmstadt Univ. of Technol., Germany
Abstract :
In this work, we present a so-called material method for the computation of electrostatic force in MEMS and compare it with the commonly-used spatial method. Numerical results are presented for a fixed-free beam structure.
Keywords :
beams (structures); computational electromagnetics; electrostatics; micromechanical devices; MEMS; computational electromagnetics; electrostatic forces; fixed-free beam structure; material method; micromechanical devices; spatial method; Computational geometry; Computational modeling; Computer science; Electrodynamics; Electrostatics; Equations; Integrated circuit technology; Laboratories; Materials science and technology; Micromechanical devices;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN :
0-7803-9062-8
DOI :
10.1109/ESIME.2005.1502801
