Title :
On the evaluation of damping forces in MEMS
Author :
Frangi, A. ; Corigliano, Alberto ; Spinola, G.
Author_Institution :
Dept. of Struct. Eng., Milan Politecnico, Italy
Abstract :
The analysis of micro-electro-mechanical structures is addressed focusing on the evaluation of damping forces exerted by the surrounding gas on moving parts. A mixed formulation based on both velocity and traction integral equations is employed and accelerated via a fast multipole method. Several examples are addressed in order to test the convergence properties of the proposed formulation.
Keywords :
continuum mechanics; convergence; damping; flow; integral equations; micromechanical devices; MEMS; continuum mechanics; convergence; damping forces; fast multipole method; flow; micro-electro-mechanical structures; micromechanical devices; surrounding gas; traction integral equations; velocity integral equations; Acceleration; Damping; Frequency; Integral equations; Large-scale systems; Micromechanical devices; Production; Solids; Structural engineering; Testing;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN :
0-7803-9062-8
DOI :
10.1109/ESIME.2005.1502802
