Title :
Charge Collection Measurements on SOI Capacitors using Heavy Ion Microprobe at GSI
Author :
Torres, A. ; Sauvestre, J.E. ; Fischer, B.E. ; Barberet, P.
Author_Institution :
Commissariat a l´´Energie Atomique, Gif sur Yvette
Abstract :
Quantitative charge collection measurements have been performed on SOI capacitors using a58N33+ micro beam at 3.6 MeV/u. Collection efficiencies as well as charge sharing effects on adjacent devices through coincidence measurements are reported and discussed in the frame of comparisons between Synopsys code simulations and experimental results.
Keywords :
capacitors; silicon-on-insulator; SOI capacitors; charge collection; heavy ion microprobe; synopsys code simulations; Capacitors; Charge measurement; Circuit simulation; Current measurement; Electrodes; IEEE members; Performance evaluation; Silicon; Substrates; Testing; Charge Collection; Heavy Ion Microprobe; SOI capacitors; Synopsis Simulation;
Conference_Titel :
Radiation and Its Effects on Components and Systems, 2005. RADECS 2005. 8th European Conference on
Conference_Location :
Cap d´Agde
Print_ISBN :
978-0-7803-9502-2
Electronic_ISBN :
0379-6566
DOI :
10.1109/RADECS.2005.4365610
