DocumentCode
1895839
Title
Charge Collection Measurements on SOI Capacitors using Heavy Ion Microprobe at GSI
Author
Torres, A. ; Sauvestre, J.E. ; Fischer, B.E. ; Barberet, P.
Author_Institution
Commissariat a l´´Energie Atomique, Gif sur Yvette
fYear
2005
fDate
19-23 Sept. 2005
Abstract
Quantitative charge collection measurements have been performed on SOI capacitors using a58N33+ micro beam at 3.6 MeV/u. Collection efficiencies as well as charge sharing effects on adjacent devices through coincidence measurements are reported and discussed in the frame of comparisons between Synopsys code simulations and experimental results.
Keywords
capacitors; silicon-on-insulator; SOI capacitors; charge collection; heavy ion microprobe; synopsys code simulations; Capacitors; Charge measurement; Circuit simulation; Current measurement; Electrodes; IEEE members; Performance evaluation; Silicon; Substrates; Testing; Charge Collection; Heavy Ion Microprobe; SOI capacitors; Synopsis Simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Radiation and Its Effects on Components and Systems, 2005. RADECS 2005. 8th European Conference on
Conference_Location
Cap d´Agde
ISSN
0379-6566
Print_ISBN
978-0-7803-9502-2
Electronic_ISBN
0379-6566
Type
conf
DOI
10.1109/RADECS.2005.4365610
Filename
4365610
Link To Document