• DocumentCode
    1895839
  • Title

    Charge Collection Measurements on SOI Capacitors using Heavy Ion Microprobe at GSI

  • Author

    Torres, A. ; Sauvestre, J.E. ; Fischer, B.E. ; Barberet, P.

  • Author_Institution
    Commissariat a l´´Energie Atomique, Gif sur Yvette
  • fYear
    2005
  • fDate
    19-23 Sept. 2005
  • Abstract
    Quantitative charge collection measurements have been performed on SOI capacitors using a58N33+ micro beam at 3.6 MeV/u. Collection efficiencies as well as charge sharing effects on adjacent devices through coincidence measurements are reported and discussed in the frame of comparisons between Synopsys code simulations and experimental results.
  • Keywords
    capacitors; silicon-on-insulator; SOI capacitors; charge collection; heavy ion microprobe; synopsys code simulations; Capacitors; Charge measurement; Circuit simulation; Current measurement; Electrodes; IEEE members; Performance evaluation; Silicon; Substrates; Testing; Charge Collection; Heavy Ion Microprobe; SOI capacitors; Synopsis Simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Radiation and Its Effects on Components and Systems, 2005. RADECS 2005. 8th European Conference on
  • Conference_Location
    Cap d´Agde
  • ISSN
    0379-6566
  • Print_ISBN
    978-0-7803-9502-2
  • Electronic_ISBN
    0379-6566
  • Type

    conf

  • DOI
    10.1109/RADECS.2005.4365610
  • Filename
    4365610