Title :
Introduction of a general model for the resonance parameters of fluid sensors and validation with recent sensor setups
Author :
Heinisch, Martin ; Jakoby, Bernhard ; Voglhuber-Brunnmaier, Thomas ; Dufour, Isabelle
Author_Institution :
Inst. f. Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
Abstract :
A comprehensive investigation and comparison of recently published resonant viscosity and mass density sensors are presented. This investigation is based on the application of a generalized model and a subsequent interpretation of results. The devised model relates the measured resonant parameters (resonance frequency and quality factor) of the frequency response to the physical parameters of the fluid (mass density, shear viscosity and temperature). The presented model is applied to eight different resonant sensors in a frequency range from 400 Hz to 3.7 MHz and quality factors between 0.7 to 500.
Keywords :
Q-factor; density measurement; frequency response; mass measurement; viscosity measurement; fluid temperature; frequency 400 Hz to 3.7 MHz; frequency response; generalized model; mass density sensors; quality factor; resonance frequency; resonant viscosity sensors; shear viscosity; Resonant frequency; Temperature; Temperature dependence; Temperature measurement; Temperature sensors; Viscosity;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985070