DocumentCode
189620
Title
Challenges in the realization of a fully integrated optical lab-on-chip
Author
Nicoletti, S. ; Barritault, P. ; Boutami, S. ; Brun, M. ; Gliere, A. ; Labeye, P. ; Rouxel, J. ; Czarny, J. ; Lhermet, H. ; Carras, M. ; Maisons, G.
Author_Institution
DOPT/SCOOP/LCNA, Univ. Grenoble Alpes, Grenoble, France
fYear
2014
fDate
2-5 Nov. 2014
Firstpage
649
Lastpage
652
Abstract
This paper presents and discusses recent achievements in the realization of a miniaturized optical sensor based on photoacoustic detection and it illustrates the potential of the co-integration of Si-based Photonic Integrated Circuits, IC/MEMS and QCL technologies.
Keywords
acoustic transducers; gas sensors; integrated optics; lab-on-a-chip; optical sensors; photodetectors; IC-MEMS technology; QCL technology; fully integrated optical lab-on-chip; miniaturized optical gas sensor; photoacoustic detection; photonic integrated circuit; quantum cascade laser; Integrated circuits; Integrated optics; Laser theory; Optical device fabrication; Optical sensors; Photonics; Quantum cascade lasers; Mid-IR photonics; Optical sensors; QCL sources; photoacoustic;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2014 IEEE
Conference_Location
Valencia
Type
conf
DOI
10.1109/ICSENS.2014.6985082
Filename
6985082
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