Sensitivity improvement of a resonant 3-axis magnetometer using dual mass vibrating system

This study designs and implements the approach to improve the performance of resonant magnetometer using the dual mass vibrating system. As compare with the existing single mass vibrating system, the presented dual mass design could increase the dynamic response and further improve the sensing signal of the magnetometer. In application, the present design has been implemented on the Silicon-on-insulation (SOI) wafer with a relatively simple manufacturing process. The measurements indicate: the sensitivity improvements of the present dual mass design are respectively 61% for in-plane magnetic field and 98% for out-of-plane magnetic field.