A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure

In this paper, a highly double-decoupled selfoscillation gyroscope is presented. Deliberate frame demonstrates small cross talk between drive mode and sense mode of less than 0.5% simulated by FEM tool and 1.35% verified by experimental measurements. Tested results exhibit that the bandwidth of the structure has a good immunity to fabrication imperfections. With the deployment of area-varied capacitors and high aspect-ratio structures, large quality factors and low drive voltage are achieved operating at atmospheric pressure, which are 217 and 97 for drive mode and sense mode, respectively, with a 1Vpeak-peak AC drive voltage and 10 V DC bias. Measured scale factor is 10.7 mv/deg/s with a R²-nonlinearity of 0.12% in the range of plusmn300deg/s. The noise equivalent rate is 0.0013deg/s/Hz^1/2 (=4.68deg/h/Hz^1/2) over 100 Hz bandwidth. The bias stability can achieve 1deg/s for a 6-hour measurement and 0.3deg/s for 120 seconds without any temperature control method employed (1-sigma).