DocumentCode :
189682
Title :
Towards atomic force microscopy measurements using differential self-mixing interferometry
Author :
Azcona, Francisco J. ; Royo, Santiago ; Jha, Ajit
Author_Institution :
Centre for Sensors, Instrum. & Syst. Dev., UPC-Barcelona Tech, Terrassa, Spain
fYear :
2014
fDate :
2-5 Nov. 2014
Firstpage :
766
Lastpage :
770
Abstract :
In this paper, we explore the possibility of joining two measurement techniques that share a similar time frame and that are interested in describing the properties of materials through the study of the micro and nanometric scale. Atomic force microscopy (AFM) is a well established method capable of measuring different material properties by examining the deflection of a micro-cantilever caused by the sample surface force interactions. The cantilever deflection is typically estimated using the optical lever technique which requires a careful alignment of the laser beam and the cantilever. To reduce such problem, we propose the use of differential self-mixing interferometry (DSMI). A test to prove the feasibility of applying the DSMI on an AFM cantilever will be discussed as well as the problems found during the measurement. Preliminary results show that DSMI is capable of following up cantilever sinusoidal displacements with amplitudes in the range of 200 and 100nm which can usually be found in AFM non-contact and taping modes.
Keywords :
atomic force microscopy; cantilevers; laser beams; micromechanical devices; atomic force microscopy cantilever; atomic force microscopy measurements; atomic force microscopy noncontact mode; atomic force microscopy taping mode; cantilever sinusoidal displacements; differential self-mixing interferometry; laser beam; material properties; measurement techniques; microcantilever deflection; micrometric scale; nanometric scale; optical lever technique; sample surface force interactions; time frame; Displacement measurement; Measurement by laser beam; Microscopy; Optical feedback; Optical interferometry; Sensors; Time measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
Type :
conf
DOI :
10.1109/ICSENS.2014.6985112
Filename :
6985112
Link To Document :
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