Title :
Modelling of a micro Coriolis mass flow sensor for sensitivity improvement
Author :
Groenesteijn, J. ; van de Ridder, L. ; Lotters, J.C. ; Wiegerink, R.J.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.
Keywords :
finite element analysis; flow measurement; flow sensors; mass measurement; microchannel flow; microsensors; optimisation; FEM modelling; Matlab package SPACAR; arbitrary channel geometry; eigenfrequency; isopropyl alcohol; microCoriolis mass flow sensor; microchannel; multiaxis flexible body model; numerical computation; optimization; resonating structure; sensitivity improvement; water; Computational modeling; Electron tubes; Finite element analysis; Fluid flow measurement; Mathematical model; Sensitivity; Shape; Coriolis mass flow sensor; flexible body model; modelling;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985160
