Screen printed flexible capacitive pressure sensor

Author

Eshkeiti, A. ; Emamian, S. ; Avathu, Sai G. R. ; Narakathu, B.B. ; Joyce, M.J. ; Joyce, M.K. ; Bazuin, B.J. ; Atashbar, M.Z.

Author_Institution

Dept. of Electr. & Comput. Eng., Western Michigan Univ., Kalamazoo, MI, USA

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

1192

Lastpage

1195

Abstract

A novel flexible fully printed capacitive based pressure sensor was designed and fabricated using screen printing technique. Silver (Ag) ink and polydimethylsiloxane (PDMS) were printed on a flexible polyethylene terephthalate (PET) substrate as metallization and dielectric layers, respectively. The capacitive response of the sensor demonstrated a percentage change of 1 % and 3.6 % for compressive forces of 0.2 MPa and 2.4 MPa, respectively when compared to the base capacitance. The response of the pressure sensor is analyzed and presented in this paper.

Keywords

capacitive sensors; dielectric thin films; flexible electronics; polymer films; pressure sensors; semiconductor device metallisation; silver; thick film sensors; Ag; PDMS; PET; compressive forces; dielectric layers; flexible polyethylene terephthalate; metallization; polydimethylsiloxane; pressure 0.2 MPa to 2.4 MPa; screen printed flexible capacitive pressure sensor; Capacitance; Dielectrics; Electrodes; Fabrication; Ink; Printing; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985222

Filename

6985222