Title :
Ferrite-integrated on-chip RF solenoid inductor
Author :
Yang, Chen ; Ren, Tian-Ling ; Liu, Li-Tian ; Yuan, Yuan ; Wu, Zheng-Zheng ; Gu, Lei ; Li, Xin-Xin ; Wang, Xin ; Xin Wang
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
New on-chip RF solenoid inductors with Ni-Zn-Cu ferrite-filled structure are reported. The concave-suspending solenoids are fabricated by a post-CMOS MEMS process, and then a CMOS compatible low-temperature nano-powder-mixed-photoresist filling technique is used to fill ferrites into the inductor cavities. It shows significant improvements in inductance L and quality factor Q up to +60% and +107%, respectively, to multi-GHz.
Keywords :
CMOS integrated circuits; Q-factor; inductance; inductors; micromechanical devices; photoresists; solenoids; NiZnCu; concave-suspending solenoids; ferrite-integrated on-chip RF solenoid inductor; inductance; inductor cavities; low-temperature nanopowder-mixed-photoresist filling technique; postCMOS MEMS process; quality factor; Conducting materials; Degradation; Ferrites; Inductance; Inductors; Magnetic losses; Magnetic materials; Radio frequency; Soft magnetic materials; Solenoids;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716621
