Title :
A CMOS interdigital capacitive humidity sensor enhanced by a multi-layered structure
Author :
Jian-Qiu Huang ; Wen-Hao Chen ; Dong-Ping Zhu ; Lei Han
Author_Institution :
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
This paper reports a novel interdigital capacitive humidity sensor enhanced by a multi-layered structure. Compared with a typical interdigital capacitive humidity sensor, both the sensitive capacitance and the sensitivity were enhanced by the improved structure. According to the test results the sensitivity and hysteresis of the humidity sensor is 10F/%RH and 3%RH respectively. The response time of the humidity senor is 15s.
Keywords :
CMOS integrated circuits; capacitive sensors; humidity sensors; hysteresis; CMOS interdigital capacitive humidity sensor; multilayered structure; response time; sensor hysteresis; sensor sensitivity; time 15 s; Capacitance; Electrodes; Humidity; Hysteresis; Resistance; Sensitivity; Time factors;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985289
