DocumentCode :
1900388
Title :
Detecting non-hydrogen containing species with field effect devices
Author :
Andersson, Mike ; Spetz, Anita Lloyd
Author_Institution :
Dept. of Phys., Chem., & Biol., Linkoping Univ., Linkoping
fYear :
2008
fDate :
26-29 Oct. 2008
Firstpage :
1320
Lastpage :
1323
Abstract :
An investigation of the influence and role of oxygen in the detection of non-hydrogen containing substances with Pt/SiO2/SiC based MOS field effect sensors, employing new model systems, has been carried out. With the use of a novel intermediate layer, by which the direct influence of hydrogen on the sensor response can be markedly reduced, the part of the sensor response which is not directly related to hydrogen (which to a small extent is always present in any gas mixture) could be resolved. The Pt/SiO2 NO reduction/oxidation model system has also been studied from a sensor perspective and the results compared to spectroscopic and mass spectrometry studies of the surface reactions from the field of catalysis. The results support the hypothesis from earlier work that the removal of oxygen from the sensor surface (e.g. by oxidation reactions with CO or NO) to a certain extent directly is involved in the detection of non-hydrogen containing species.
Keywords :
MIS devices; catalysis; chemical sensors; mass spectra; oxidation; reduction (chemical); surface chemistry; MOS field effect sensors; Pt-SiO2-SiC; catalysis; mass spectrometry; nonhydrogen containing substances detection; reduction-oxidation model system; spectroscopy; surface reactions; Automotive materials; Biosensors; Gas detectors; Hydrogen; Metal-insulator structures; Oxidation; Semiconductor materials; Sensor systems; Silicon carbide; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
ISSN :
1930-0395
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2008.4716688
Filename :
4716688
Link To Document :
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