• DocumentCode
    1900489
  • Title

    Thermodynamics of the formation of buried k-fulleride layers by ion implantation

  • Author

    Kastner, Johann ; Palmetshofer, L. ; Piplits, K. ; Kuzmany, H.

  • Author_Institution
    Universitat Wien
  • fYear
    1994
  • fDate
    24-29 July 1994
  • Firstpage
    422
  • Lastpage
    422
  • Keywords
    Atomic layer deposition; Backscatter; Conductivity measurement; Implants; Ion implantation; Mass spectroscopy; Temperature; Thermodynamics; X-ray diffraction; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
  • Conference_Location
    Seoul, Korea
  • Type

    conf

  • DOI
    10.1109/STSM.1994.835577
  • Filename
    835577