Title :
Thermodynamics of the formation of buried k-fulleride layers by ion implantation
Author :
Kastner, Johann ; Palmetshofer, L. ; Piplits, K. ; Kuzmany, H.
Author_Institution :
Universitat Wien
Keywords :
Atomic layer deposition; Backscatter; Conductivity measurement; Implants; Ion implantation; Mass spectroscopy; Temperature; Thermodynamics; X-ray diffraction; X-ray scattering;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.835577
