DocumentCode
1900489
Title
Thermodynamics of the formation of buried k-fulleride layers by ion implantation
Author
Kastner, Johann ; Palmetshofer, L. ; Piplits, K. ; Kuzmany, H.
Author_Institution
Universitat Wien
fYear
1994
fDate
24-29 July 1994
Firstpage
422
Lastpage
422
Keywords
Atomic layer deposition; Backscatter; Conductivity measurement; Implants; Ion implantation; Mass spectroscopy; Temperature; Thermodynamics; X-ray diffraction; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location
Seoul, Korea
Type
conf
DOI
10.1109/STSM.1994.835577
Filename
835577
Link To Document