A microplatform for measurement of cell mechanical properties

A novel microplatform has been fabricated on SOI wafers for applying uniaxial strain to a single cell while simultaneously measuring its force response. This microplatform includes two chevron thermal actuators able to bring cells 14 um stretching displacement and an easy-fabricating piezoresistive lateral force sensor with a sensitivity of 56.166 (V/V)/N, which makes it an effective tool for analyzing the mechanics of a single cell. This lateral force sensor has a low requirement for the lithography alignment and its piezoresistors are formed by one-step surface ion implantation. A front-side releasing method is applied to suspend this microplatform. This method helps us avoid from the friction problems and low yield rates that common appeared in the traditional method. Our design provides a good reference for devising lateral force sensors and suspending complex microstructures.