• DocumentCode
    190090
  • Title

    Determination of thermal properties of gases under flow conditions

  • Author

    Reyes-Romero, Diego ; Cubukcu, Ali S. ; Urban, Gerald

  • Author_Institution
    Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • fYear
    2014
  • fDate
    2-5 Nov. 2014
  • Firstpage
    1644
  • Lastpage
    1647
  • Abstract
    This paper presents a calorimetric flow sensor that is capable of determining the thermal conductivity of flowing gases. The measuring principle relies on using AC heat generation at 200 Hz in order to confine the oscillatory thermal boundary layer within a very small distance from the surface, where, due to the non-slip condition, the flow velocity profile is always close to zero. For this, the sensor features a very sensitive Ge thermistor closely surrounded by a thin, circular chromium heater. The measurement signals are the amplitude and the phase shift of the temperature oscillations. A simple analytical model is developed to show that the phase shift signal is a function of the thermal conductivity (k) of the flowing gas only, which allows its direct measurement. This relationship fit experimentally results from many gases for flow rates up to 750 sccm. Measurement of the volumetric heat capacity (ρcp) under flow conditions is also possible.
  • Keywords
    calorimetry; elemental semiconductors; flow sensors; germanium; specific heat; thermal conductivity measurement; thermistors; AC heat generation; Ge; calorimetric flow sensor; circular chromium heater; flow velocity profile; frequency 200 Hz; oscillatory thermal boundary layer; phase shift signal; thermal conductivity; thermistor; volumetric heat capacity; Conductivity; Gases; Heating; Temperature measurement; Thermal conductivity; Thermal sensors; Thermistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2014 IEEE
  • Conference_Location
    Valencia
  • Type

    conf

  • DOI
    10.1109/ICSENS.2014.6985335
  • Filename
    6985335