DocumentCode
190090
Title
Determination of thermal properties of gases under flow conditions
Author
Reyes-Romero, Diego ; Cubukcu, Ali S. ; Urban, Gerald
Author_Institution
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear
2014
fDate
2-5 Nov. 2014
Firstpage
1644
Lastpage
1647
Abstract
This paper presents a calorimetric flow sensor that is capable of determining the thermal conductivity of flowing gases. The measuring principle relies on using AC heat generation at 200 Hz in order to confine the oscillatory thermal boundary layer within a very small distance from the surface, where, due to the non-slip condition, the flow velocity profile is always close to zero. For this, the sensor features a very sensitive Ge thermistor closely surrounded by a thin, circular chromium heater. The measurement signals are the amplitude and the phase shift of the temperature oscillations. A simple analytical model is developed to show that the phase shift signal is a function of the thermal conductivity (k) of the flowing gas only, which allows its direct measurement. This relationship fit experimentally results from many gases for flow rates up to 750 sccm. Measurement of the volumetric heat capacity (ρcp) under flow conditions is also possible.
Keywords
calorimetry; elemental semiconductors; flow sensors; germanium; specific heat; thermal conductivity measurement; thermistors; AC heat generation; Ge; calorimetric flow sensor; circular chromium heater; flow velocity profile; frequency 200 Hz; oscillatory thermal boundary layer; phase shift signal; thermal conductivity; thermistor; volumetric heat capacity; Conductivity; Gases; Heating; Temperature measurement; Thermal conductivity; Thermal sensors; Thermistors;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2014 IEEE
Conference_Location
Valencia
Type
conf
DOI
10.1109/ICSENS.2014.6985335
Filename
6985335
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