Title :
Strain gauge factor and TCR of sputter deposited Pt thin films up to 850°C
Author :
Fricke, Soeren ; Friedberger, Alois ; Mueller, Gerhard ; Seidel, Helmut ; Schmid, Ulrich
Author_Institution :
Dept. of Sensors, Electron. & Syst. Integration, EADS Deutschland GmbH, Munich
Abstract :
A novel, custom built measurement setup for the temperature dependent characterization of thin films under ambient and controlled gas atmosphere in respect to their electro-mechanical performance is presented. The strain gauge factor of platinum thin films (thickness: 1 mum) is determined at temperatures ranging from room temperature up to 850degC on aluminum oxide samples designed to provide a constant strain value along their axis.
Keywords :
platinum; sputter deposition; strain gauges; thin films; TCR; electromechanical performance; gas atmosphere; platinum thin films; sputter deposition; strain gauge factor; Capacitive sensors; Ceramics; Contacts; Laser beams; Sputtering; Strain measurement; Temperature control; Temperature dependence; Temperature distribution; Transistors;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716739
