DocumentCode
1902446
Title
Recessed Metal/Silicon Contact Resistance Measured by the Cross-Bridge-Kelvin Resistor Structure - Numerical Analysis
Author
Bing-Yue Tsui ; Mao-Chieh Chen
Author_Institution
Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Taiwan
fYear
1993
fDate
6-7 March 1993
Firstpage
99
Lastpage
100
Keywords
Area measurement; Conductivity; Contact resistance; Electrical resistance measurement; Phase change materials; Predictive models; Resistors; Silicon; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Modeling & Simulation, 1993. SMS Technical Digest. 1993 Symposium on
Conference_Location
Taipei, Taiwan
Print_ISBN
0-7803-1225-2
Type
conf
DOI
10.1109/SMS.1993.664574
Filename
664574
Link To Document