DocumentCode
1902497
Title
Application of energy-filtering TEM in contrast enhancement and elemental identification in IC failure analysis
Author
Zhang, W. ; Ng, S. ; Cheong, D. ; Lim, S.
Author_Institution
Failure Anal., Syst. on Silicon Manuf. Co., Singapore, Singapore
fYear
2003
fDate
7-11 July 2003
Firstpage
202
Lastpage
205
Abstract
In this paper, application of EFTEM, combined with EDAX in STEM mode, is addressed to structural and chemical characterization in 0.25 μm technology node.
Keywords
chemical analysis; failure analysis; integrated circuit reliability; interface structure; transmission electron microscopy; IC failure analysis; chemical analysis; energy filtering TEM; integrated circuits; reliability; transmission electron microscopy; Application specific integrated circuits; Chemical analysis; Chemical elements; Chemical technology; Electrons; Energy resolution; Failure analysis; Filtering; Filters; Scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the
Print_ISBN
0-7803-7722-2
Type
conf
DOI
10.1109/IPFA.2003.1222766
Filename
1222766
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