Title :
Application of energy-filtering TEM in contrast enhancement and elemental identification in IC failure analysis
Author :
Zhang, W. ; Ng, S. ; Cheong, D. ; Lim, S.
Author_Institution :
Failure Anal., Syst. on Silicon Manuf. Co., Singapore, Singapore
Abstract :
In this paper, application of EFTEM, combined with EDAX in STEM mode, is addressed to structural and chemical characterization in 0.25 μm technology node.
Keywords :
chemical analysis; failure analysis; integrated circuit reliability; interface structure; transmission electron microscopy; IC failure analysis; chemical analysis; energy filtering TEM; integrated circuits; reliability; transmission electron microscopy; Application specific integrated circuits; Chemical analysis; Chemical elements; Chemical technology; Electrons; Energy resolution; Failure analysis; Filtering; Filters; Scattering;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the
Print_ISBN :
0-7803-7722-2
DOI :
10.1109/IPFA.2003.1222766
