Title :
Implementing Thermal Laser and Photoelectric Laser Stimulation in a failure analysis laboratory
Author :
Firiti, A. ; Lewis, David ; Beaudoin, F. ; Perdu, P. ; Haller, G. ; Danto, Y.
Author_Institution :
STMicroelectron., Rousset, France
Abstract :
First Photoelectric Laser Stimulation results (OBIC or LIVA) obtained with an upgraded version of a PHEMOS 1000 from Hamamatsu are presented. This technique is applied in a case study concerning ESD defect localization and is compared to the Thermal Laser Stimulation one.
Keywords :
failure analysis; integrated circuit reliability; integrated circuit testing; Hamamatsu; failure analysis; photoelectric laser stimulation; thermal Laser; Failure analysis; Infrared heating; Laboratories; Laser beams; Optical beams; Optical microscopy; Optical sensors; Power lasers; Stimulated emission; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the
Print_ISBN :
0-7803-7722-2
DOI :
10.1109/IPFA.2003.1222768
