DocumentCode
1902945
Title
NBTI reliability analysis for a 90 nm CMOS technology
Author
Puchner, H. ; Hinh, L.
Author_Institution
Technol. R&D, Cypress Semicond., San Jose, CA, USA
fYear
2004
fDate
21-23 Sept. 2004
Firstpage
257
Lastpage
260
Abstract
We present a comprehensive empirical study to investigate the impact of negative bias temperature instability (NBTI) on device performance and reliability. The NBTI lifetime is calculated for different lifetime criteria such as 10% Idsat or 50 mV Vt shift for different bias conditions, temperature, duty cycles, gate length, and gate width dependence, to allow a true comparison between different methodologies. Finally, a circuit level implementation approach is presented to estimate the NBTI device level reliability at a circuit level. Therefore, the absolute threshold voltage shift is calculated and inserted into the spice level transistor model for corner simulations.
Keywords
MOSFET; semiconductor device models; semiconductor device reliability; thermal stability; 90 nm; CMOS technology; NBTI lifetime; NBTI reliability analysis; PMOSFET transistors; bias conditions; device circuit level reliability; duty cycles; gate length; gate width; negative bias temperature instability; spice level transistor model; temperature; threshold voltage shift; Analytical models; CMOS technology; Degradation; Extrapolation; MOSFET circuits; Niobium compounds; Stress; Temperature; Threshold voltage; Titanium compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research conference, 2004. ESSDERC 2004. Proceeding of the 34th European
Print_ISBN
0-7803-8478-4
Type
conf
DOI
10.1109/ESSDER.2004.1356538
Filename
1356538
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