Flexible semiconductor devices: fingerprint sensor and electrophoretic display on plastic [TFT based]

Author

Takao, Hiroki ; Miyasaka, Mitsutoshi ; Kawai, Hideyuki ; Hara, Hiroyuki ; Miyazaki, Atsushi ; Kodaira, Taimei ; Tam, Simon W B ; Inoue, Satoshi ; Shimoda, Tatsuya

Author_Institution

Technol. Platform Res. Center, Seiko Epson Corp., Nagano, Japan

fYear

2004

fDate

21-23 Sept. 2004

Firstpage

309

Lastpage

312

Abstract

We are on the brink of a new era in flexible semiconductor devices. Outstanding devices, such as a fingerprint sensor (FPS) and an active-matrix electrophoretic display (AM-EPD), are fabricated on a plastic sheet, using thin film transistor (TFT) technology. The devices are first fabricated on a glass substrate with high-performance low-temperature processed polycrystalline silicon (LTPS) TFTs, then later transferred onto a plastic sheet. The FPS and AM-EPD devices on plastic are presented in this paper as examples of flexible semiconductor devices.

Keywords

capacitive sensors; display devices; electrophoretic coatings; fingerprint identification; plastic packaging; thin film transistors; AM-EPD; FPS; TFT technology; active-matrix electrophoretic display; capacitive sensors; fingerprint sensor; flexible semiconductor devices; low-temperature processed polycrystalline silicon TFT; plastic display; plastic sheet; thin film transistor; Active matrix technology; Displays; Fingerprint recognition; Glass; Plastics; Semiconductor devices; Silicon; Substrates; Thin film sensors; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research conference, 2004. ESSDERC 2004. Proceeding of the 34th European

Print_ISBN

0-7803-8478-4

Type

conf

DOI

10.1109/ESSDER.2004.1356551

Filename

1356551