• DocumentCode
    1904255
  • Title

    Resistance to electromigration of purely intermetallic micro-bump interconnections for 3D-device stacking

  • Author

    Labie, Riet ; Ruythooren, Wouter ; Baert, Kris ; Beyne, Eric ; Swinnen, Bart

  • Author_Institution
    IMEC, Kapeldreef 75, 3001 Leuven, Belgium, 0032 16 281 237, Riet.Labie@imec.be
  • fYear
    2008
  • fDate
    1-4 June 2008
  • Firstpage
    19
  • Lastpage
    21
  • Abstract
    Electromigration is a well-known root-cause for long-term reliability problems. This paper demonstrates that the resistance to electromigration is significantly increased when solder-based intermetallic bonding is used as an alternative to standard solder flip-chip interconnections. Two different intermetallic joint-types are investigated: Cu-Sn and Co-Sn. After 1000h, no failures or degradation mechanisms are observed for testing conditions (150°C and 0.63mA/¿m2) which are 10 times harsher in terms of current density compared to electromigration triggering density values for standard solder flip-chip applications (0.05mA/¿m2).
  • Keywords
    Bonding; Current density; Electrical resistance measurement; Electromigration; Intermetallic; Metallization; Solids; Stacking; Temperature; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference, 2008. IITC 2008. International
  • Conference_Location
    Burlingame, CA, USA
  • Print_ISBN
    978-1-4244-1911-1
  • Electronic_ISBN
    978-1-4244-1912-8
  • Type

    conf

  • DOI
    10.1109/IITC.2008.4546913
  • Filename
    4546913