DocumentCode
1904255
Title
Resistance to electromigration of purely intermetallic micro-bump interconnections for 3D-device stacking
Author
Labie, Riet ; Ruythooren, Wouter ; Baert, Kris ; Beyne, Eric ; Swinnen, Bart
Author_Institution
IMEC, Kapeldreef 75, 3001 Leuven, Belgium, 0032 16 281 237, Riet.Labie@imec.be
fYear
2008
fDate
1-4 June 2008
Firstpage
19
Lastpage
21
Abstract
Electromigration is a well-known root-cause for long-term reliability problems. This paper demonstrates that the resistance to electromigration is significantly increased when solder-based intermetallic bonding is used as an alternative to standard solder flip-chip interconnections. Two different intermetallic joint-types are investigated: Cu-Sn and Co-Sn. After 1000h, no failures or degradation mechanisms are observed for testing conditions (150°C and 0.63mA/¿m2) which are 10 times harsher in terms of current density compared to electromigration triggering density values for standard solder flip-chip applications (0.05mA/¿m2).
Keywords
Bonding; Current density; Electrical resistance measurement; Electromigration; Intermetallic; Metallization; Solids; Stacking; Temperature; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Interconnect Technology Conference, 2008. IITC 2008. International
Conference_Location
Burlingame, CA, USA
Print_ISBN
978-1-4244-1911-1
Electronic_ISBN
978-1-4244-1912-8
Type
conf
DOI
10.1109/IITC.2008.4546913
Filename
4546913
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