Title :
Preparation of Y-Ba-Cu-O films by ion beam sputtering with a hollow cathode oxidation
Author :
Cai, X.Y. ; Namai, T. ; Usami, Kimiyoshi ; Kobayashi, Takehiko ; Goto, Tetsu
Author_Institution :
The University of Electro-Communications
Keywords :
Cathodes; Chemical industry; High temperature superconductors; Ion beams; Oxidation; Sputtering; Substrates; Superconducting films; Superconducting materials; Yttrium barium copper oxide;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.835801
