DocumentCode
1905068
Title
Amorphous Silicon TFTs and their Applications
Author
Morin, F.
Author_Institution
Directeur Technique de Planecran, CNET Rte de Tregastel, 22300 Lannion, France
fYear
1992
fDate
14-17 Sept. 1992
Firstpage
171
Lastpage
177
Abstract
Despite its relative poor field-effect mobility, but thanks to its versatile process, the a-Si: H Thin Film Transistor knows today an incredibly strong development. The a-Si:H TFT performances fit quite well the LCD addressing requirements , and manufacturing processes are now mastered at large scale. TV and Data Graphic displays are now available. The sensor domain begins to be concerned by this large area technology.
Keywords
Amorphous materials; Amorphous silicon; Atomic layer deposition; Integrated circuit technology; Liquid crystal displays; Manufacturing processes; Photovoltaic cells; Physics; Plasma displays; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location
Leuven, Belgium
Print_ISBN
0444894780
Type
conf
Filename
5435190
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