Title :
Amorphous Silicon TFTs and their Applications
Author_Institution :
Directeur Technique de Planecran, CNET Rte de Tregastel, 22300 Lannion, France
Abstract :
Despite its relative poor field-effect mobility, but thanks to its versatile process, the a-Si: H Thin Film Transistor knows today an incredibly strong development. The a-Si:H TFT performances fit quite well the LCD addressing requirements , and manufacturing processes are now mastered at large scale. TV and Data Graphic displays are now available. The sensor domain begins to be concerned by this large area technology.
Keywords :
Amorphous materials; Amorphous silicon; Atomic layer deposition; Integrated circuit technology; Liquid crystal displays; Manufacturing processes; Photovoltaic cells; Physics; Plasma displays; Thin film transistors;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
