Title :
Compound Semiconductor Devices for Operation at Elevated Temperatures
Author_Institution :
Institut fÿr Hochfrequenztechnik, Technische Hochschule, Darmstadt, Merckstr. 25, 6100 Darmstadt, Germany
Keywords :
Electromagnetic heating; Engines; Gallium arsenide; Heat sinks; Plasma applications; Plasma immersion ion implantation; Plasma temperature; Semiconductor devices; Semiconductor materials; Temperature sensors;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium