DocumentCode :
1905345
Title :
Compound Semiconductor Devices for Operation at Elevated Temperatures
Author :
Hartnagel, H.L.
Author_Institution :
Institut fÿr Hochfrequenztechnik, Technische Hochschule, Darmstadt, Merckstr. 25, 6100 Darmstadt, Germany
fYear :
1992
fDate :
14-17 Sept. 1992
Firstpage :
115
Lastpage :
121
Keywords :
Electromagnetic heating; Engines; Gallium arsenide; Heat sinks; Plasma applications; Plasma immersion ion implantation; Plasma temperature; Semiconductor devices; Semiconductor materials; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
Print_ISBN :
0444894780
Type :
conf
Filename :
5435202
Link To Document :
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