Title :
Comparative stud of low temperature poly-Si TFTs obtained by various crystallization techniques for use in active matrix LCDs
Author :
Pattyn, H. ; Poortmans, J. ; Debenest, P. ; Caymax, M. ; Vetter, P. ; Elliq, M. ; Fogarassy, E. ; Nényei, Z. ; Nijs, J. ; Mertens, R.
Author_Institution :
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Abstract :
Based on the electrical characteristics of low temperature poly-Si TFTs, various crystallization methods for the formation of the poly-Si bulk layer are evaluated.
Keywords :
Active matrix liquid crystal displays; Crystallization; Electron traps; Fabrication; Glass; Grain size; MOSFETs; Rapid thermal processing; Temperature; Thin film transistors;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
