A tele-micro machining system with operational environment transmission under a stereo-SEM

This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. Finally, the cutting force in the micro-world is analyzed and compared with that in the macro-world