A tele-micro machining system with operational environment transmission under a stereo-SEM

Author

Mitsuishi, Mamoru ; Sugita, Naohiko ; Nagao, Takaaki ; Hatamura, Yotaro

Author_Institution

Fac. of Eng., Tokyo Univ., Japan

Volume

3

fYear

1996

fDate

22-28 Apr 1996

Firstpage

2194

Abstract

This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. Finally, the cutting force in the micro-world is analyzed and compared with that in the macro-world

Keywords

cutting; feedback; force control; industrial robots; manufacturing processes; micromachining; scanning electron microscopy; stereo image processing; telerobotics; 3-axis force sensing table; auditory information; force feedback; master joystick; operational environment transmission; stereo-SEM; tele-micro machining system; Capacitive sensors; Control theory; Force feedback; Machining; Magnetic levitation; Master-slave; Micromechanical devices; Motion control; System testing; Wrist;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 1996. Proceedings., 1996 IEEE International Conference on

Conference_Location

Minneapolis, MN

ISSN

1050-4729

Print_ISBN

0-7803-2988-0

Type

conf

DOI

10.1109/ROBOT.1996.506194

Filename

506194