Title :
Fabrication of NiO/Bi/sub 2/Sr/sub 2/CaCuO/sub/spl delta/ hetero-structure by a DC hollow cathode sputtering
Author :
Moriya, M. ; Suzuki, Ryo ; Kobayashi, Takehiko ; Goto, Tetsu
Author_Institution :
The University of Electro-Communications
Keywords :
Bismuth compounds; Cathodes; Ceramics; Chemicals; Fabrication; High temperature superconductors; Strontium; Substrates; Superconducting films; Superconductivity;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.835843