DocumentCode :
1905990
Title :
A digital CMOS micro-hotplate array for analysis of environmentally relevant gases
Author :
Frey, U. ; Graf, M. ; Taschini, S. ; Kirstein, K.-U. ; Hagleitner, C. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
fYear :
2004
fDate :
21-23 Sept. 2004
Firstpage :
299
Lastpage :
302
Abstract :
A monolithic gas sensor array fabricated in industrial CMOS-technology combined with post-CMOS micromachining is presented. The device comprises an array of three metal-oxide-coated micro-hotplates with integrated MOS-transistor heaters and the needed driving and signal-conditioning circuitry. The operating temperature of the SnO2 metal oxide resistors varies between 200 and 350°C. Three digital PID controllers enable individual temperature regulation. Interface and temperature control are implemented digitally, making a power-saving mode and temperature modulation, to enhance the analyte discrimination, applicable. Emphasis was placed on a modular system with the required analog circuitry reduced to a minimum.
Keywords :
CMOS integrated circuits; driver circuits; gas sensors; micromachining; microsensors; resistance heating; signal processing equipment; temperature control; thin film resistors; three-term control; tin compounds; 200 to 350 degC; SnO2; analyte discrimination; digital CMOS micro-hotplate array; digital PID controllers; driving circuitry; environmentally relevant gas analysis; integrated MOS-transistor heaters; metal oxide resistors; metal-oxide-coated micro-hotplates; monolithic gas sensor array; post-CMOS micromachining; power-saving mode; serial interface; signal-conditioning circuitry; temperature control; temperature modulation; temperature regulation; Circuits; Cogeneration; Gas detectors; Gas industry; Gases; Micromachining; Sensor arrays; Temperature control; Temperature sensors; Textile industry;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2004. ESSCIRC 2004. Proceeding of the 30th European
Print_ISBN :
0-7803-8480-6
Type :
conf
DOI :
10.1109/ESSCIR.2004.1356677
Filename :
1356677
Link To Document :
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